{
  "usingInstructions" : [ "Für die Strukturierung aller Arten von  Oberflächen (nicht nur von Halbleitern) mittels optischer Strahlung." ],
  "broaderTermGeneric" : [ {
    "id" : "https://d-nb.info/gnd/4191584-7",
    "label" : "Lithografie <Halbleitertechnologie>"
  } ],
  "relatedDdcWithDegreeOfDeterminacy2" : [ {
    "id" : "http://dewey.info/class/621.38152/",
    "label" : "http://dewey.info/class/621.38152/"
  }, {
    "id" : "http://dewey.info/class/621.381531/",
    "label" : "http://dewey.info/class/621.381531/"
  } ],
  "describedBy" : {
    "id" : "https://d-nb.info/gnd/4174516-4/about",
    "maintainer" : {
      "id" : "https://ld.zdb-services.de/resource/organisations/DE-101",
      "label" : "https://ld.zdb-services.de/resource/organisations/DE-101"
    },
    "dctCreator" : {
      "id" : "https://ld.zdb-services.de/resource/organisations/DE-101",
      "label" : "https://ld.zdb-services.de/resource/organisations/DE-101"
    },
    "license" : {
      "id" : "http://creativecommons.org/publicdomain/zero/1.0/",
      "label" : "http://creativecommons.org/publicdomain/zero/1.0/"
    },
    "dateModified" : "2022-09-14T10:39:43.000",
    "descriptionLevel" : {
      "id" : "https://d-nb.info/standards/vocab/gnd/description-level#1",
      "label" : "Katalogisierungslevel 1"
    }
  },
  "gndIdentifier" : "4174516-4",
  "id" : "https://d-nb.info/gnd/4174516-4",
  "preferredName" : "Fotolithografie <Halbleitertechnologie>",
  "type" : [ "SubjectHeadingSensoStricto", "AuthorityResource", "SubjectHeading" ],
  "variantName" : [ "Photolithographie <Halbleitertechnologie>" ],
  "@context" : "https://lobid.org/gnd/context.jsonld",
  "gndSubjectCategory" : [ {
    "id" : "https://d-nb.info/standards/vocab/gnd/gnd-sc#31.9b",
    "label" : "Elektronik, Nachrichtentechnik"
  } ],
  "oldAuthorityNumber" : [ "(DE-588c)4174516-4" ]
}